@phdthesis{yang:tel-02997877,
TITLE = {Fabrication and characterization of silicon nanowires for devices applications compatible with low temperature ($\le$300 ˚C) flexible substrates},
AUTHOR = {Yang, Kai},
URL = {https://theses.hal.science/tel-02997877},
NUMBER = {2019REN1S123},
SCHOOL = {Universit{\'e} de Rennes},
YEAR = {2019},
MONTH = Dec, KEYWORDS = {Silicon nanowires ; Low temperature ; SLS process ; Spacer method ; ICP-CVD ; Nanofils de silicium ; Basse temp{\'e}rature ; Proc{\'e}d{\'e} SLS ; M{\'e}thode des espaceurs ; ICP-CVD},
TYPE = {Theses},
PDF = {https://theses.hal.science/tel-02997877/file/YANG_Kai.pdf},
HAL_ID = {tel-02997877},
HAL_VERSION = {v1},
}