@phdthesis{ziani:tel-00441375,
TITLE = {Etude de nouveaux mat{\'e}riaux : Films minces perovskites oxynitrures, de la photocatalyse {\`a} la micro{\'e}lectronique},
AUTHOR = {Ziani, Ahmed},
URL = {https://theses.hal.science/tel-00441375},
SCHOOL = {Universit{\'e} Europ{\'e}enne de Bretagne},
YEAR = {2009},
MONTH = Sep, KEYWORDS = {oxynitride ; thin films ; sputtering ; epitaxy ; dielectric ; photocatalysis ; LaTiO2N ; oxynitrure ; perovskite ; couche mince ; pulv{\'e}risation cathodique ; {\'e}pitaxie ; di{\'e}lectrique ; photocatalyse},
TYPE = {Theses},
PDF = {https://theses.hal.science/tel-00441375/file/These_Ahmed_Ziani_2009_Univ_Rennes_1.pdf},
HAL_ID = {tel-00441375},
HAL_VERSION = {v1},
}