@article{grishin:hal-04229560,
TITLE = {Tailoring crystallisation of anatase TiO2 ultra-thin films grown by atomic layer deposition using 2D oxides as growth template},
AUTHOR = {Grishin, Andr{\'e} and B{\'e}rini, Bruno and Vallet, Maxime and Hurand, Simon and Maudet, Florian and Sartel, Corinne and Fr{\'e}gnaux, Mathieu and Nowak, Sophie and Amiri, Ga{\"e}lle and Hassani, Said S. and Aureau, Damien and Sallet, Vincent and Demange, Val{\'e}rie and Dumont, Yves},
URL = {https://hal.science/hal-04229560},
JOURNAL = {Applied Surface Science},
PUBLISHER = {Elsevier},
VOLUME = {641},
PAGES = {158446},
YEAR = {2023},
DOI = {10.1016/j.apsusc.2023.158446},
KEYWORDS = {Anatase TiO₂ ; DLI-ALD ; Ellipsometry ; Nanosheets},
PDF = {https://hal.science/hal-04229560/file/TiO2%20Applied%20Surface%20Science_2023.pdf},
HAL_ID = {hal-04229560},
HAL_VERSION = {v1},
}