@book{song:hal-04209981,
TITLE = {Plasma at the Nanoscale: A volume in Micro and Nano Technologies},
AUTHOR = {Song, Huaihe and Amrane, Abdeltif and Yasin, Ghulam and Nguyen, Tuan Anh and Assadi, Aymen Amine},
URL = {https://univ-rennes.hal.science/hal-04209981},
PUBLISHER = {Elsevier},
YEAR = {2022},
DOI = {10.1016/C2020-0-02955-5},
HAL_ID = {hal-04209981},
HAL_VERSION = {v1},
}