@article{meyer:hal-04186877,
TITLE = {Mass spectrometry and in situ x-ray photoelectron spectroscopy investigations of organometallic species induced by the etching of germanium, antimony and selenium in a methane-based plasma},
AUTHOR = {Meyer, T and Girard, A and Bou{\v s}ka, M and Baudet, E and Baillieul, M and Nĕmec, P and Nazabal, V and Cardinaud, C},
URL = {https://hal.science/hal-04186877},
JOURNAL = {Plasma Sources Science and Technology},
PUBLISHER = {IOP Publishing},
VOLUME = {32},
NUMBER = {8},
PAGES = {085003},
YEAR = {2023},
DOI = {10.1088/1361-6595/aceaa5},
KEYWORDS = {mass spectrometry ; x-ray photoelectron spectroscopy ; organometallics ; plasma etching ; CH4},
PDF = {https://hal.science/hal-04186877/file/JPCSA4Template%20-%20Revised_Manuscript.pdf},
HAL_ID = {hal-04186877},
HAL_VERSION = {v1},
}