@article{kirscher:hal-03828126,
TITLE = {Deep-UV laser direct writing of photoluminescent ZnO submicron patterns: an example of nanoarchitectonics concept},
AUTHOR = {Kirscher, Quentin and Hajjar-Garreau, Samar and Grasset, Fabien and Berling, Dominique and Soppera, Olivier},
URL = {https://hal.science/hal-03828126},
JOURNAL = {Science and Technology of Advanced Materials},
PUBLISHER = {National Institute for Materials Science},
VOLUME = {23},
NUMBER = {1},
PAGES = {535-546},
YEAR = {2022},
MONTH = Sep, DOI = {10.1080/14686996.2022.2116294},
KEYWORDS = {ZnO ; Nanocrystals ; Photolithography ; Photoluminescence ; Optical coatings ; Nanoarchitectonics},
PDF = {https://hal.science/hal-03828126/file/Deep%20UV%20laser%20direct%20write%20of%20photoluminescent%20ZnO%20submicron%20patterns%20an%20example%20of%20nanoarchitectonics%20concept.pdf},
HAL_ID = {hal-03828126},
HAL_VERSION = {v1},
}