@article{proust:hal-03773329,
TITLE = {Hafnium Oxide Nanostructured Thin Films: Electrophoretic Deposition Process and DUV Photolithography Patterning},
AUTHOR = {Proust, Vanessa and Kirscher, Quentin and Nguyen, Thi Kim Ngan and Obringer, Lisa and Ishii, Kento and Rault, Ludivine and Demange, Val{\'e}rie and Berthebaud, David and Ohashi, Naoki and Uchikoshi, Tetsuo and Berling, Dominique and Soppera, Olivier and Grasset, Fabien},
URL = {https://hal.science/hal-03773329},
JOURNAL = {Nanomaterials},
PUBLISHER = {MDPI},
VOLUME = {12},
NUMBER = {14},
PAGES = {2334},
YEAR = {2022},
DOI = {10.3390/nano12142334},
KEYWORDS = {hafnium oxide ; nanoparticles ; thin films ; nanoarchitectonic ; hydrothermal ; electrophoretic deposition ; DUV ; photolithography ; micropatterning},
PDF = {https://hal.science/hal-03773329/file/nanomaterials-12-02334.pdf},
HAL_ID = {hal-03773329},
HAL_VERSION = {v1},
}