@article{gutwirth:hal-03715161,
TITLE = {Tailoring of Multisource Deposition Conditions towards Required Chemical Composition of Thin Films},
AUTHOR = {Gutwirth, Jan and Kotrla, Magdalena and Halenkovic, Tomas and Nazabal, Virginie and Nemec, Petr},
URL = {https://hal.science/hal-03715161},
JOURNAL = {Nanomaterials},
PUBLISHER = {MDPI},
VOLUME = {12},
NUMBER = {11},
PAGES = {1830},
YEAR = {2022},
DOI = {10.3390/nano12111830},
KEYWORDS = {thin film ; deposition ; sputtering ; co-sputtering ; Ga-Sb-Te ; calculation ; model},
PDF = {https://hal.science/hal-03715161v1/file/nanomaterials-12-01830-v2.pdf},
HAL_ID = {hal-03715161},
HAL_VERSION = {v1},
}