@article{mokhtari:hal-03695451,
TITLE = {Chemical imaging of oxide confinement layers in GaAs/AlxGa1--xAs VCSELs},
AUTHOR = {Mokhtari, Merwan and Pagnod-Rossiaux, Philippe and Levallois, Christophe and Pofelski, Alexandre and Laruelle, Fran{\c c}ois and Botton, Gianluigi A and Landesman, Jean-Pierre},
URL = {https://hal.science/hal-03695451},
JOURNAL = {Semiconductor Science and Technology},
PUBLISHER = {IOP Publishing},
VOLUME = {37},
NUMBER = {7},
PAGES = {075016},
YEAR = {2022},
MONTH = Jul, DOI = {10.1088/1361-6641/ac7070},
KEYWORDS = {electron microscopy ; chemical mapping ; VCSEL ; lateral oxidation},
PDF = {https://hal.science/hal-03695451/file/SST_revised_paper_Mokhtari.pdf},
HAL_ID = {hal-03695451},
HAL_VERSION = {v1},
}