@inproceedings{gastebois:hal-03667538,
TITLE = {Transformation and processes from thin filmto complex structures semiconductor/insulator/organic/semiconductor/insulator by PECVD interactions},
AUTHOR = {Gastebois, Jordan and Coulon, Nathalie and Lhermite, Herv{\'e} and Levallois, Christophe and Mor{\'e}ac, Alain and Garnier, Lucas and Le Bihan, France and B{\^e}che, Bruno},
URL = {https://hal.science/hal-03667538},
BOOK
TITLE = {Journ{\'e}e Ecole Doctoral 3M},
ADDRESS = {Rennes, France},
SERIES = {''Transformations et interactions''},
YEAR = {2022},
MONTH = Jun, KEYWORDS = {sensors. ; resonators cavities ; Raman analyses ; ellipsometric analyses ; organic UV210 and silicon ; Integrated photonics},
HAL_ID = {hal-03667538},
HAL_VERSION = {v1},
}