@article{pichon:hal-03662125,
TITLE = {Low temperature (≦600{\textdegree}C) unhydrogenated in-situ doped polysilicon thin film transistors: Towards a technology for flat panel displays},
AUTHOR = {Pichon, L. and Raoult, F. and Mourgues, K. and Kis-Sion, K. and Mohammed-Brahim, T. and Bonnaud, O.},
URL = {https://hal.science/hal-03662125},
JOURNAL = {Thin Solid Films},
PUBLISHER = {Elsevier},
VOLUME = {296},
NUMBER = {1-2},
PAGES = {133-136},
YEAR = {1997},
MONTH = Mar, DOI = {10.1016/S0040-6090(96)09373-X},
HAL_ID = {hal-03662125},
HAL_VERSION = {v1},
}