@article{briand:hal-03662108,
TITLE = {Polysilicon in situ phosphorus doping control over large concentration range using low temperature, low pressure chemical vapour deposition growth process},
AUTHOR = {Briand, D. and Sarret, M. and Le Bihan, F. and Bonnaud, O. and Pichon, L.},
URL = {https://hal.science/hal-03662108},
JOURNAL = {Materials Science and Technology},
PUBLISHER = {Maney Publishing},
VOLUME = {11},
NUMBER = {11},
PAGES = {1207-1209},
YEAR = {2013},
MONTH = Jul, DOI = {10.1179/mst.1995.11.11.1207},
HAL_ID = {hal-03662108},
HAL_VERSION = {v1},
}