@article{kission:hal-03662105,
TITLE = {Optimization of silica deposition by sputtering in the silicon thin film transistors realization in low temperature technology},
AUTHOR = {Kis Sion, K. and Pinel, J. and Doll{\'e},
V. and Pichon, L. and Bonnaud, O.},
URL = {https://hal.science/hal-03662105},
JOURNAL = {Microelectronic Engineering},
PUBLISHER = {Elsevier},
VOLUME = {28},
NUMBER = {1-4},
PAGES = {459-462},
YEAR = {1995},
MONTH = Jun, DOI = {10.1016/0167-9317(95)00097-R},
HAL_ID = {hal-03662105},
HAL_VERSION = {v1},
}