@article{ahammou:hal-03481497,
TITLE = {Strain engineering in III-V photonic components through structuration of SiN x films},
AUTHOR = {Ahammou, Brahim and Abdelal, Aysegul and Landesman, Jean-Pierre and Levallois, Christophe and Mascher, Peter},
URL = {https://hal.science/hal-03481497},
JOURNAL = {Journal of Vacuum Science \& Technology B, Nanotechnology and Microelectronics},
PUBLISHER = {AVS through the American Institute of Physics},
VOLUME = {40},
NUMBER = {1},
PAGES = {012202},
YEAR = {2022},
MONTH = Jan,
DOI = {10.1116/6.0001352},
PDF = {https://hal.science/hal-03481497/file/JVB21-AR-STREND2021-00236.pdf},
HAL_ID = {hal-03481497},
HAL_VERSION = {v1},
}
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