@article{yang:hal-03099729,
TITLE = {3D growth of silicon nanowires under pure hydrogen plasma at low temperature (250 degrees C)},
AUTHOR = {Yang, Kai and Coulon, Nathalie . and Sala{\"u}n, Anne-Claire and Pichon, Laurent},
URL = {https://hal.science/hal-03099729},
JOURNAL = {Nanotechnology},
PUBLISHER = {Institute of Physics},
VOLUME = {32},
NUMBER = {6},
PAGES = {065602},
YEAR = {2021},
MONTH = Feb, DOI = {10.1088/1361-6528/abc2ee},
KEYWORDS = {silicon nanowires ; indium catalyst ; solid ; hydrogen plasma ; Silicon nanowires ; Solid-Liquid-Solid},
PDF = {https://hal.science/hal-03099729/file/Yang%20et%20al.%20-%202020%20-%203D%20growth%20of%20silicon%20nanowires%20under%20pure%20hydrogen.pdf},
HAL_ID = {hal-03099729},
HAL_VERSION = {v1},
}