@article{bonnaud:hal-03003495,
TITLE = {The technological challenges of microelectronics for the next generations of connected sensors},
AUTHOR = {Bonnaud, O.A.},
URL = {https://hal.science/hal-03003495},
JOURNAL = {International Journal of Plasma Environmental Science and Technology},
PUBLISHER = {Institute of Electrostatics Japan},
VOLUME = {14},
NUMBER = {1},
PAGES = {1-8},
YEAR = {2020},
DOI = {10.34343/ijpest.2020.14.e01002},
HAL_ID = {hal-03003495},
HAL_VERSION = {v1},
}