@article{germanicus:hal-02533135,
TITLE = {Microstructure and electrical characterization based on AFM of very high-doped polysilicon grains},
AUTHOR = {Germanicus, Rosine Coq and Picard, E. and Domenges, B. and Danilo, K. and Rogel, R.},
URL = {https://normandie-univ.hal.science/hal-02533135},
JOURNAL = {Applied Surface Science},
PUBLISHER = {Elsevier},
VOLUME = {253},
NUMBER = {14},
PAGES = {6006-6012},
YEAR = {2007},
MONTH = May, DOI = {10.1016/j.apsusc.2006.12.114},
KEYWORDS = {ISD polysilicon LPCVD AFM TEM SCM Surface potential C-AFM ; ISD polysilicon LPCVD AFM TEM SCM Surface potential C-AFM},
HAL_ID = {hal-02533135},
HAL_VERSION = {v1},
}