@inproceedings{messaid:hal-02404340,
TITLE = {TiN layer epitaxial growth deposited at different radiofrequency powers onto the monocrystalline substrate MgO},
AUTHOR = {Messaid, Bachir and Le Paven, Claire and Talaighil, Razika and Benzerga, Ratiba and Marlec, Florent and Le Gendre, Laurent and Bensouici, Fay{\c c}al},
URL = {https://hal.science/hal-02404340},
BOOK
TITLE = {ISMSD2019 : 4th International Symposium on Materials and Sustainable Development},
ADDRESS = {Boumerdes, Algeria},
YEAR = {2019},
MONTH = Nov, HAL_ID = {hal-02404340},
HAL_VERSION = {v1},
}