@article{bulou:hal-02314413,
TITLE = {Wide variations of SiCxNy:H thin films optical constants deposited by H2/N2/Ar/hexamethyldisilazane microwave plasma},
AUTHOR = {Bulou, Simon and Le Brizoual, Laurent and Miska, Patrice and de Poucques, Ludovic and Bougdira, Jamal and Belmahi, Mohammed},
URL = {https://hal.science/hal-02314413},
JOURNAL = {Surface and Coatings Technology},
PUBLISHER = {Elsevier},
VOLUME = {208},
PAGES = {46-50},
YEAR = {2012},
MONTH = Sep, DOI = {10.1016/j.surfcoat.2012.07.079},
HAL_ID = {hal-02314413},
HAL_VERSION = {v1},
}