@article{bonnaud:hal-02196407,
TITLE = {ULSI and Thin Film Semiconductor Technologies: Evolution of Industry and Research Linked to Higher Education in France},
AUTHOR = {Bonnaud, Olivier},
URL = {https://hal.science/hal-02196407},
JOURNAL = {Electrochemical Society Transactions},
SERIES = {Dielectric Science and Materials - 2019 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT 7)},
VOLUME = {90},
NUMBER = {1},
PAGES = {3-18},
YEAR = {2019},
MONTH = Jun, DOI = {10.1149/09001.0003ecst},
KEYWORDS = {Microelectronics ; Thin film technologies ; Ultra Large Scale Integration ; Higher education},
HAL_ID = {hal-02196407},
HAL_VERSION = {v1},
}