@inproceedings{legendre:hal-02134839,
TITLE = {(Sr,La)-(Ta,Ti)-O-N perovskite oxide and oxynitride films: influence of the deposition and annealing conditions on the structure and electrical properties},
AUTHOR = {Le Gendre, Laurent and Le Paven, Claire and Haydoura, Mohamad and Benzerga, Ratiba and Marlec, Florent and Sharaiha, Ala and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois},
URL = {https://hal.science/hal-02134839},
BOOK
TITLE = {10th International Symposium on NiTrides (ISNT 2019)},
ADDRESS = {Barcelone, Spain},
YEAR = {2019},
MONTH = Jun, HAL_ID = {hal-02134839},
HAL_VERSION = {v1},
}