@inproceedings{lucci:hal-01910535,
TITLE = {A general III-V/Si growth process description},
AUTHOR = {Lucci, Ida and Charbonnier, Simon and Pedesseau, Laurent and Vallet, Maxime and Cerutti, Laurent and Rodriguez, Jean-Baptiste and Tourni{\'e},
Eric and Bernard, Rozenn and L{\'e}toublon, Antoine and Bertru, Nicolas and Le Corre, Alain and Rennesson, Stephanie and Semond, Fabrice and Patriarche, Gilles and Largeau, Ludovic and Turban, Pascal and Ponchet, Anne and Cornet, C.},
URL = {https://hal.science/hal-01910535},
BOOK
TITLE = {European Materials Research Society - Spring Meeting 2018 (E-MRS 2018 Spring Meeting)},
ADDRESS = {Strasbourg, France},
YEAR = {2018},
MONTH = Jun, HAL_ID = {hal-01910535},
HAL_VERSION = {v1},
}