@article{fouchier:hal-01904717,
TITLE = {Characterization of Plasma Induced Damage and Strain on InP Patterns and Their Impact on Luminescence},
AUTHOR = {Fouchier, Marc and Fahed, Maria and Pargon, Erwine and Rochat, N{\'e}vine and Landesman, Jean-Pierre and Rouchon, Denis and Roque, Joyce and Rovayaz, Karine and Martinez, Eugenie and Labau, S{\'e}bastien},
URL = {https://univ-rennes.hal.science/hal-01904717},
JOURNAL = {MRS Advances},
PUBLISHER = {Cambridge University Press},
VOLUME = {3},
NUMBER = {57-58},
PAGES = {3373 - 3378},
YEAR = {2018},
MONTH = Nov, DOI = {10.1557/adv.2018.448},
HAL_ID = {hal-01904717},
HAL_VERSION = {v1},
}