@article{li:hal-01860236,
TITLE = {Annealing and biasing effects on the structural and optical properties of PECVD-grown TiO2 films from TTIP/O2 plasma},
AUTHOR = {Li, D. and Dai, S. and Goullet, A. and Carette, Mich{\`e}le and Granier, A. and Landesman, Jean-Pierre},
URL = {https://hal.science/hal-01860236},
JOURNAL = {Journal of Materials Science: Materials in Electronics},
PUBLISHER = {Springer Verlag},
VOLUME = {29},
NUMBER = {15},
PAGES = {13254-13264},
YEAR = {2018},
MONTH = Jun, DOI = {10.1007/s10854-018-9449-6},
HAL_ID = {hal-01860236},
HAL_VERSION = {v1},
}