@article{maille:hal-01845323,
TITLE = {Structure and morphological study of nanometer W and W3O thin films},
AUTHOR = {Maill{\'e},
Laurence and Sant, C. and Le Paven-Thivet, C. and Legrand-Buscema, C. and Garnier, Pierre},
URL = {https://hal.science/hal-01845323},
JOURNAL = {Thin Solid Films},
PUBLISHER = {Elsevier},
VOLUME = {428},
NUMBER = {1-2},
PAGES = {237 - 241},
YEAR = {2003},
MONTH = Mar, DOI = {10.1016/S0040-6090(02)01277-4},
KEYWORDS = {RF-sputtering ; tungsten thin films ; W 3 O structure ; W structure ; Atomic Force Microscopy ; X-Ray diffraction \_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_\_},
PDF = {https://hal.science/hal-01845323/file/structureand%20morphological%20W%20and%20W3O%20-%202003.pdf},
HAL_ID = {hal-01845323},
HAL_VERSION = {v1},
}