@article{godet:hal-01803578,
TITLE = {Depth profiling of noble gas atoms implanted in Al matrix: A photoelectron energy loss spectroscopy study},
AUTHOR = {Godet, Christian and Santana, Victor and David, Denis G.F.},
URL = {https://hal.science/hal-01803578},
JOURNAL = {Thin Solid Films},
PUBLISHER = {Elsevier},
VOLUME = {659},
PAGES = {70 - 80},
YEAR = {2018},
MONTH = Aug, DOI = {10.1016/j.tsf.2018.05.038},
KEYWORDS = {ion implantation ; XPS ; energy loss ; plasmon ; depth distribution ; noble gas ; aluminum},
PDF = {https://hal.science/hal-01803578/file/Godet%20et%20al_Depth%20profiling%20of%20noble%20gas%20atoms%20implanted%20in%20Al%20matrix.pdf},
HAL_ID = {hal-01803578},
HAL_VERSION = {v1},
}