@inproceedings{messaid:hal-01763085,
TITLE = {Effect of the substrate's temperature on the characteristics of TiN thin films deposited by reactive cathodic sputtering for solar cells applications},
AUTHOR = {Messaid, Bachir and Le Paven, Claire and Talaighil, Razika and Marlec, Florent and Benzerga, Ratiba and Le Gendre, Laurent},
URL = {https://hal.science/hal-01763085},
BOOK
TITLE = {ISMSD2017, 3rd International Symposium on Materials and Sustainable Development},
ADDRESS = {Boumerdes, Algeria},
YEAR = {2017},
MONTH = Nov, HAL_ID = {hal-01763085},
HAL_VERSION = {v1},
}