@article{li:hal-01723409,
TITLE = {Structural and Optical Properties of PECVD TiO 2 -SiO 2 Mixed Oxide Films for Optical Applications},
AUTHOR = {Li, Dayu and Elisabeth, St{\'e}phane and Granier, Agn{\`e}s A. and Carette, Mich{\`e}le and Goullet, Antoine and Landesman, Jean-Pierre},
URL = {https://hal.science/hal-01723409},
JOURNAL = {Plasma Processes and Polymers},
PUBLISHER = {Wiley-VCH Verlag},
VOLUME = {13},
NUMBER = {9},
PAGES = {918 - 928},
YEAR = {2016},
MONTH = Sep, DOI = {10.1002/ppap.201600012},
HAL_ID = {hal-01723409},
HAL_VERSION = {v1},
}