@inproceedings{landesman:hal-01711092,
TITLE = {Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Chlorine Chemistry},
AUTHOR = {Landesman, Jean-Pierre and Cassidy, Daniel T and Pargon, Erwine and Levallois, Christophe and Mokhtari, Merwan and Jimenez, Juan and Torres, Alfredo},
URL = {https://hal.science/hal-01711092},
BOOK
TITLE = {17th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVII)},
ADDRESS = {Valladolid, Spain},
YEAR = {2017},
MONTH = Oct, HAL_ID = {hal-01711092},
HAL_VERSION = {v1},
}