@misc{marlec:hal-01588050,
TITLE = { Study of the Post-nitridation of Strontium and Tantalum Based Oxide and Oxynitride Thin Films},
AUTHOR = {Marlec, Florent and Le Gendre, Laurent and Le Paven, Claire and Chevir{\'e},
Fran{\c c}ois and Benzerga, Ratiba and Tessier, Franck and Chevaucherie, M. and Sharaiha, Ala},
URL = {https://univ-rennes.hal.science/hal-01588050},
NOTE = {Poster},
HOWPUBLISHED = {9th International Symposium on Nitrides and Related Materials (ISNT2017)},
YEAR = {2017},
MONTH = Aug, HAL_ID = {hal-01588050},
HAL_VERSION = {v1},
}