@article{mino:hal-01579652,
TITLE = {Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring},
AUTHOR = {Mino, Lorenzo and Bonino, Valentina and Agostino, Angelo and Prestipino, Carmelo and Borfecchia, Elisa and Lamberti, Carlo and Operti, Lorenza and Fretto, Matteo and de Leo, Natascia and Truccato, Marco},
URL = {https://univ-rennes.hal.science/hal-01579652},
JOURNAL = {Scientific Reports},
PUBLISHER = {Nature Publishing Group},
VOLUME = {7},
NUMBER = {1},
PAGES = {9066},
YEAR = {2017},
MONTH = Dec, DOI = {10.1038/s41598-017-09443-3},
PDF = {https://univ-rennes.hal.science/hal-01579652/file/Mino%20-%20Maskless%20X-Ray%20Writing.pdf},
HAL_ID = {hal-01579652},
HAL_VERSION = {v1},
}