@article{verbrugghe:hal-01542758,
TITLE = {Study of tungsten films deposited by DC sputtering dedicated to integrated heaters},
AUTHOR = {Verbrugghe, Nathalie and Fasquelle, Didier and Duponchel, Benoit and Deputier, Stephanie},
URL = {https://univ-rennes.hal.science/hal-01542758},
JOURNAL = {Journal of Vacuum Science \& Technology B Microelectronics and Nanometer Structures},
PUBLISHER = {American Vacuum Society (AVS)},
VOLUME = {35},
NUMBER = {3},
PAGES = {10.1116/1.4981786},
YEAR = {2017},
MONTH = May, DOI = {10.1116/1.4981786},
HAL_ID = {hal-01542758},
HAL_VERSION = {v1},
}