@inproceedings{legendre:hal-01457020,
TITLE = {Structure and electronic properties of reactively RF magnetron sputtered ABO₂N oxynitride thin films},
AUTHOR = {Le Gendre, Laurent and Le Paven-Thivet, Claire and Marlec, Florent and Benzerga, Ratiba and Ferri, Anthony and Fasquelle, Didier and Laur, Vincent and Jacq, Simon and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Saitzek, S{\'e}bastien and Desfeux, Rachel and Sharaiha, Ala},
URL = {https://hal.science/hal-01457020},
BOOK
TITLE = {6th Workshop NIMS-UR1-CNRS-SG ''Materials and Sustainable development: Issues and Challenges of the 21st century},
ADDRESS = {Fukuoka, Japan},
SERIES = {Proceedings of the 6th Workshop NIMS-UR1-CNRS-SG},
PAGES = {8},
YEAR = {2016},
MONTH = Oct, HAL_ID = {hal-01457020},
HAL_VERSION = {v1},
}