@article{lepaven:hal-01404863,
TITLE = {Ferroelectric and dielectric study of strontium tantalum based perovskite oxynitride films deposited by reactive rf magnetron sputtering},
AUTHOR = {Le Paven, Claire and Benzerga, Ratiba and Ferri, Anthony and Fasquelle, Didier and Laur, Vincent and Le Gendre, Laurent and Marlec, Florent and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Desfeux, Rachel and Saitzek, S{\'e}bastien and Castel, Xavier and Sharaiha, Ala},
URL = {https://hal.science/hal-01404863},
JOURNAL = {Materials Research Bulletin},
PUBLISHER = {Elsevier},
SERIES = {The 9th international conference on the Microwave Materials and Their Applications},
VOLUME = {96},
NUMBER = {Part 2},
PAGES = {126-132},
YEAR = {2017},
MONTH = Dec, DOI = {10.1016/j.materresbull.2016.11.030},
KEYWORDS = {Oxynitride ; Perovskite ; Thin films ; Reactive sputtering ; Epitaxy ; Permittivity ; Ferroelectricity},
PDF = {https://hal.science/hal-01404863/file/LePaven_Materials%20Research%20Bulletin_2016b.pdf},
HAL_ID = {hal-01404863},
HAL_VERSION = {v1},
}
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