@article{cirino:hal-01398394,
TITLE = {Simulation and fabrication of silicon nitride microring resonator by DUV lithography},
AUTHOR = {Cirino, Giuseppe A and Barea, Luis A and von Zuben, Antonio A and Lhermite, Herv{\'e} and B{\^e}che, Bruno and de Sagazan, Olivier and Frateschi, Newton and M-Brahim, Tayeb},
URL = {https://hal.science/hal-01398394},
JOURNAL = {IEEE conference publications},
PAGES = {1 - 4},
YEAR = {2016},
DOI = {10.1109/SBMicro.2016.7731346},
KEYWORDS = {Biochemical sensing ; Microcavity resonator ; Silicon photonics ; DUV Lithography ; Evanescent coupling},
PDF = {https://hal.science/hal-01398394/file/IEEE-Giuseppe_2016.pdf},
HAL_ID = {hal-01398394},
HAL_VERSION = {v1},
}