@inproceedings{kervran:hal-01397913,
TITLE = {Microcrystalline silicon based TFTs and resistors for reliable flexible electronics},
AUTHOR = {Kervran, Y. and Kandoussi, K. and Dong, H. and Janfaoui, S. and Coulon, N. and Simon, C. and Jacques, E. and Mohammed-Brahim, T.},
URL = {https://univ-rennes.hal.science/hal-01397913},
BOOK
TITLE = {Symposium on Thin Film Transistors 13, TFT 2016 - PRiME 2016/230th ECS Meeting},
ADDRESS = {Honolulu, United States},
PUBLISHER = {Electrochemical Society Inc.},
VOLUME = {75},
NUMBER = {10},
PAGES = {13--25},
YEAR = {2016},
MONTH = Oct, DOI = {10.1149/07510.0013ecst},
KEYWORDS = {Flexible electronics ; Metallic films ; Microcrystalline silicon ; Silicon ; Temperature ; Thick films ; Thin film circuits ; Thin films ; Low temperatures ; Microcrystalline silicon films ; Plastic substrates ; Reproducibilities ; Silicon films ; Silicon-based ; Thin film transistors},
HAL_ID = {hal-01397913},
HAL_VERSION = {v1},
}