@article{marlec:hal-01392710,
TITLE = {Deposition and dielectric study as function of thickness of perovskite oxynitride SrTaO₂N thin films elaborated by reactive sputtering},
AUTHOR = {Marlec, Florent and Le Paven, Claire and Le Gendre, Laurent and Benzerga, Ratiba and Chevir{\'e},
Fran{\c c}ois and Tessier, Franck and Gam, F and Sharaiha, Ala},
URL = {https://hal.science/hal-01392710},
JOURNAL = {Surface and Coatings Technology},
PUBLISHER = {Elsevier},
VOLUME = {324},
PAGES = {607-613},
YEAR = {2017},
MONTH = Sep, DOI = {10.1016/j.surfcoat.2016.10.053},
PDF = {https://hal.science/hal-01392710/file/2016_FMarlec.pdf},
HAL_ID = {hal-01392710},
HAL_VERSION = {v1},
}