@inproceedings{verdonck:hal-01380036,
TITLE = {Investigations of Capacitively-Coupled Plasmas by Electrostatic Probe Technique},
AUTHOR = {Verdonck, Patrick and Mansano, Ronaldo D. and Massi, Marcos and Pessoa, Rodrigo S. and Barea, Luis A. M. and M-Brahim, Tayeb and Maciel, Homero S. and Cirino, Giuseppe A. and Castro, Raul M. and Pisani, Marcelo B.},
URL = {https://univ-rennes.hal.science/hal-01380036},
BOOK
TITLE = {30th Symposium on Microelectronics Technology and Devices (SBMicro 2015)},
ADDRESS = {Salvador, Brazil},
PUBLISHER = {IEEE},
YEAR = {2015},
MONTH = Aug, DOI = {10.1109/SBMicro.2015.7298131},
KEYWORDS = {sf6 ; discharges},
HAL_ID = {hal-01380036},
HAL_VERSION = {v1},
}