@inproceedings{barea:hal-01380029,
TITLE = {Fresnel Zone Plate Array Fabricated by Maskless Lithography},
AUTHOR = {Barea, Luis A. and Zuben, Antonio A. Von and M-Brahim, Tayeb and Montagnoli, Arlindo N. and Hospital, Michel and Frateschi, N. and Cirino, Giuseppe A.},
URL = {https://univ-rennes.hal.science/hal-01380029},
BOOK
TITLE = {30th Symposium on Microelectronics Technology and Devices (SBMicro 2015)},
ADDRESS = {Salvador, Brazil},
PUBLISHER = {IEEE},
YEAR = {2015},
MONTH = Aug, DOI = {10.1109/SBMicro.2015.7298155},
KEYWORDS = {microlens arrays ; phase},
HAL_ID = {hal-01380029},
HAL_VERSION = {v1},
}