@article{li:hal-01372799,
TITLE = {Structural and optical properties of RF-biased PECVD TiO2 thin films deposited in an O2/TTIP helicon reactor},
AUTHOR = {Li, D. and Goullet, A. and Carette, Mich{\`e}le and Granier, A. and Zhang, Y. and Landesman, Jean-Pierre},
URL = {https://univ-rennes.hal.science/hal-01372799},
JOURNAL = {Vacuum},
PUBLISHER = {Elsevier},
VOLUME = {131},
PAGES = {231-239},
YEAR = {2016},
DOI = {10.1016/j.vacuum.2016.07.004},
HAL_ID = {hal-01372799},
HAL_VERSION = {v1},
}