@article{landesman:hal-01372796,
TITLE = {Defect formation during chlorine-based dry etching and their effects on the electronic and structural properties of InP/InAsP quantum wells},
AUTHOR = {Landesman, Jean-Pierre and Jimenez, Juan and Levallois, Christophe and Pommereau, Fr{\'e}d{\'e}ric and Frigeri, Cesare and Torres, Alfredo and L{\'e}ger, Yoan and Beck, Alexandre and Rhallabi, Ahmed},
URL = {https://univ-rennes.hal.science/hal-01372796},
JOURNAL = {Journal of Vacuum Science \& Technology A},
PUBLISHER = {American Vacuum Society},
VOLUME = {34},
NUMBER = {4},
PAGES = {041304},
YEAR = {2016},
MONTH = Jul, DOI = {10.1116/1.4950445},
HAL_ID = {hal-01372796},
HAL_VERSION = {v1},
}