@inproceedings{denoual:hal-01368109,
TITLE = {Microfabricated test structures for thermal gas sensor},
AUTHOR = {Denoual, Matthieu and Pouliquen, Mathieu and Robbes, D. and de Sagazan, O. and Grand, J. and Awala, H. and Mintova, S. and Inoue, S. and Mita-Tixier, A. and Mita, Y.},
URL = {https://univ-rennes.hal.science/hal-01368109},
BOOK
TITLE = {29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016},
ADDRESS = {Yokohama, Japan},
PUBLISHER = {Institute of Electrical and Electronics Engineers Inc.},
VOLUME = {2016-May},
PAGES = {16--19},
YEAR = {2016},
MONTH = Mar, DOI = {10.1109/ICMTS.2016.7476165},
KEYWORDS = {Chemical sensors ; Microelectronics ; Zeolites ; Thermal gas ; Time constants ; Microfabrication ; Thermal devices ; Test structure ; Target species ; Microfabricated},
HAL_ID = {hal-01368109},
HAL_VERSION = {v1},
}