@article{baudet:hal-01367204,
TITLE = {Selenide sputtered films development for MIR environmental sensor},
AUTHOR = {Baudet, E. and Gutierrez, Aldo and Nemec, P. and Bodiou, Lo{\"i}c and Lemaitre, Jonathan and de Sagazan, O. and Lhermitte, H. and Rinnert, E. and Michel, Karine and Bureau, B. and Charrier, Jo{\"e}l and Nazabal, Virginie},
URL = {https://univ-rennes.hal.science/hal-01367204},
JOURNAL = {Optical Materials Express},
PUBLISHER = {OSA pub},
VOLUME = {6},
NUMBER = {8},
PAGES = {2616--2627},
YEAR = {2016},
MONTH = Aug, DOI = {10.1364/OME.6.002616},
KEYWORDS = {Inductively coupled plasma ; Magnetron sputtering ; Mid-infrared spectral range ; Optical transducers ; Organic molecules ; Radio frequency magnetron sputtering ; Single mode propagation ; Ridge waveguides ; Hydrophobic polymers ; Environmental sensor ; Microsensors ; Reactive ion etching ; Refractive index ; Semiconducting selenium compounds ; Spectroscopic ellipsometry ; Surface roughness ; Germanium ; Environmental detection ; Thin films ; Waveguides ; Atomic force microscopy},
HAL_ID = {hal-01367204},
HAL_VERSION = {v1},
}