@article{belmahi:hal-01284789,
TITLE = {Microwave Plasma Process for SiCN:H Thin Films Synthesis with Composition Varying from SiC:H to SiN:H in H-2/N-2/Ar/Hexamethyldisilazane Gas Mixture},
AUTHOR = {Belmahi, Mohammed and Bulou, Simon and Thouvenin, Amanda and Poucques, Ludovic De and Hugon, Robert and Le Brizoual, Laurent and Miska, Patrice and Gen{\`e}ve, Damien and Vasseur, Jean-Luc and Bougdira, Jamal},
URL = {https://hal.science/hal-01284789},
NOTE = {\'E}quipe 104 : Nanomat{\'e}riaux},
JOURNAL = {Plasma Processes and Polymers},
PUBLISHER = {Wiley-VCH Verlag},
VOLUME = {11},
NUMBER = {6},
PAGES = {551-558},
YEAR = {2014},
MONTH = Jun, DOI = {10.1002/ppap.201300166},
HAL_ID = {hal-01284789},
HAL_VERSION = {v1},
}