@article{jacq:hal-01254806,
TITLE = {Deposition and dielectric characterization of strontium and tantalum-based oxide and oxynitride perovskite thin films},
AUTHOR = {Jacq, S. and Le Paven, C. and Le Gendre, L. and Benzerga, Ratiba and Chevir{\'e},
Fran{\c c}ois and Tessier, Franck and Sharaiha, A.},
URL = {https://univ-rennes.hal.science/hal-01254806},
JOURNAL = {Solid State Sciences},
PUBLISHER = {Elsevier},
VOLUME = {54},
PAGES = {22-29},
YEAR = {2016},
DOI = {10.1016/j.solidstatesciences.2015.12.010},
KEYWORDS = {reactive sputtering ; Thin films ; Perovskite ; Oxynitride ; epitaxy ; dielectric},
PDF = {https://univ-rennes.hal.science/hal-01254806/file/Deposition%20and%20dielectric%20characterization%20of%20strontium.pdf},
HAL_ID = {hal-01254806},
HAL_VERSION = {v1},
}