@article{kervran:hal-01240765,
TITLE = {Microcrystalline silicon: Strain gauge and sensor arrays on flexible substrate for the measurement of high deformations},
AUTHOR = {Kervran, Y. and de Sagazan, O. and Crand, S. and Coulon, N. and Mohammed-Brahim, T. and Brel, O},
URL = {https://univ-rennes.hal.science/hal-01240765},
JOURNAL = {Sensors and Actuators A: Physical },
PUBLISHER = {Elsevier},
VOLUME = {236},
PAGES = {273--280},
YEAR = {2015},
DOI = {10.1016/j.sna.2015.08.001},
KEYWORDS = {Flexible substrate ; High spatial resolution arrays ; Microcrystalline silicon ; Strain gauge arrays},
PDF = {https://univ-rennes.hal.science/hal-01240765/file/Microcrystalline%20silicon.pdf},
HAL_ID = {hal-01240765},
HAL_VERSION = {v1},
}