@inproceedings{r:hal-01153100,
TITLE = {Polycristalline silicon nanowires based TFTs compatible with CMOS technology for chemical integrated sensors},
AUTHOR = {R., Rogel and Jacques, Emmanuel and Sala{\"u}n, Anne-Claire and Pichon, Laurent},
URL = {https://hal.science/hal-01153100},
BOOK
TITLE = {International Thin Film Transistors Conf{\'e}rences, ITC 2015},
ADDRESS = {Rennes, France},
ORGANIZATION = {IETR,D{\'e}partement Micro{\'e}lectronique et Microcapteurs},
YEAR = {2015},
MONTH = Feb, HAL_ID = {hal-01153100},
HAL_VERSION = {v1},
}