@inproceedings{m:hal-01152386,
TITLE = {Silicon Obtained by MILC and SILC Techniques: Application for Top-DownLitography Nanostructures},
AUTHOR = {M., Thomas and R., Rogel and Pichon, Laurent},
URL = {https://hal.science/hal-01152386},
BOOK
TITLE = {EMRS Spring Meeting 2014},
ADDRESS = {Lille, France},
YEAR = {2014},
MONTH = May, HAL_ID = {hal-01152386},
HAL_VERSION = {v1},
}