@misc{jacq:hal-01148563,
TITLE = {Sr₂Ta₂O₇-based oxide and oxynitride perovskite films: reactive magnetron deposition and dielectric characterization},
AUTHOR = {Jacq, Simon and Le Paven-Thivet, Claire and Benzerga, Ratiba and Le Gendre, Laurent and Laur, Vincent and Ferri, A. and Saitzek, S. and Desfeux, Rachel and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Sharaiha, Ala},
URL = {https://hal.science/hal-01148563},
NOTE = {Poster},
HOWPUBLISHED = {European Materials Research Society - EMRS 2015},
YEAR = {2015},
MONTH = May, HAL_ID = {hal-01148563},
HAL_VERSION = {v1},
}