@inproceedings{jacq:hal-01148561,
TITLE = {Deposition of strontium and tantalum-based oxide and oxynitride perovskite thin films},
AUTHOR = {Jacq, Simon and Le Gendre, Laurent and Le Paven-Thivet, Claire and Benzerga, Ratiba and Tessier, Franck and Chevir{\'e},
Fran{\c c}ois and Sharaiha, Ala},
URL = {https://hal.science/hal-01148561},
BOOK
TITLE = {European Materials Research Society - EMRS 2015},
ADDRESS = {Lille, France},
YEAR = {2015},
MONTH = May, HAL_ID = {hal-01148561},
HAL_VERSION = {v1},
}